Intevac’s ENERGi® is an innovative ion implanter based on our industry leading platforms. The system is designed to meet the most advanced efficiency and productivity requirements of solar cell manufacturing.

Intevac ENERGi Benefits

  • Single pass under a continuous flux ion source
  • Fast beam tuning for dose control and dopant profile
  • Excellent dose uniformity and distribution control
  • Boron and phosphorous implanting capabilities
Diagram of ENERGi Continuous Flux Single Pass (Left) versus Competitor’s Multiple Pass Systems (Right)

ENERGi meets the solar industry efficiency roadmap today and is extensible to enable advanced cell designs and increased efficiency requirements. The platform design allows for excellent serviceability and a small footprint.