One Platform for Multiple Thin Film Applications and Deposition Technologies
Intevac MATRIX is a substrate-independent platform for multiple thin film applications for the vacuum coating industry. From its compact, modular design to its automated transport system, every aspect of MATRIX is designed to maximize productivity and minimize cost of ownership.
We are the world’s leading provider of manufacturing equipment for the hard disk drive industry and have been developing advanced thin film products and systems for more than 20 years. Our breadth of experience and technical expertise has enabled us to design MATRIX, a unique, universal platform optimized for multiple substrate sizes and materials, and specialized films.
This extremely versatile platform can perform double sided deposition without breaking vacuum, accommodate both vertical or horizontal transport and is adaptable to different atmospheric handling — either conveyor or cassette-to-cassette.
The first implementation for the MATRIX platform will integrate Intevac’s core PVD sputtering technology. For this process, the MATRIX PVD system has been engineered to produce the superior quality films solar cell manufacturers require to achieve higher efficiencies.
INTEVAC MATRIX FEATURES AND BENEFITS
- Fully integrated automation for precise small substrate handling
- High speed transport, carrier technology and unique vacuum loadlock system for high throughput
- Integrated substrate inverter system for double sided coating without breaking vacuum
- Versatile platform which can accommodate multiple thin film deposition technologies such as PVD and CVD