High Temperature Heater
Enhanced heating source capable of providing high rate of heating of solar cells at processing temperatures of 650° C with exceptional uniformity .
Dynamic Cooling Source (DCS)
This source provides high cooling rates required to rapidly reduce the temperature of solar cells for high throughput opera.
Radio Frequency (RF) Source
Operates at radio frequency and is most suitable for deposition of non-metallic (insulating) or high resistivity metals onto solar cells
Sputter Source
High efficiency, rotating magnetron assembly achieves reduced cost / watt through high target utilization and full surface erosion. Benefits include more cells coated per target, fewer target replacement cycles per week, and minimal target material waste.