NanoVista

Intevac’s NanoVista Photoluminescence Inspection System is a revolution in photovoltaic cell inspection technology. With its high throughput material handling capability and proprietary, high sensitivity, high resolution camera, NanoVista captures images in milliseconds with greater accuracy than other imaging systems. Photoluminescence images of in-process material and finished cells can be collected at 3,600 cells per hour.

NanoVista incorporates Intevac’s trademark lean design and small footprint and can be used in-line or off-line. For in-line use, our system is easily incorporated into our customers’ manufacturing flow with little if any modification. Its standalone capability allows process engineers to conduct research and develop recipes that meet their specific inspection requirements. NanoVista’s interpretive software enables our customers to perform powerful image analysis using simple graphical tools. The data analysis can then be used to provide process monitoring, simple pass/fail criteria, or wafer grading. NanoVista inspects 100% of incoming wafers to prevent defective wafer processing which results in increased throughput and yield, improved cell efficiency, tighter process control and reduced processing costs.