| Universal Source High efficiency, rotating magnetron assembly achieves reduced cost / disk through high target utilization and full surface erosion. Benefits:
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| Carbon Heating Station Efficient and uniform heater for both glass and aluminum disk substrates. The heater uses a resistive carbon element to transfer heat to the disk. Heating rate achievable on glass disks is greater than 30 °C/kW-s. |
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| Rotation Station Designed for glass disk processing. The rotation station provides full metal coverage on the disk by rotating about 10° between metal sputter steps. Glass disks are then ensured 100% metal coverage and can be followed with process steps including bias. |
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| Dynamic Cooling Station High rate cooling chamber designed for efficient and rapid cooling. The cooling rate is maximized using a copper cooling plate at 5°C and chilled water and helium cooling gas. Disks can be cooled in about 4 seconds. |
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| NCT Carbon Deposition Source Source for ultra-thin (<20 °A), high-density carbon overcoat offers excellent corrosion resistance and low particle performance. |
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| Carrier Exchange Increases overall system availability by providing a chamber, which enables exchange of carriers under vacuum conditions. The carrier exchange is an integrated chamber with a dedicated vacuum system and can store up to 32 carriers. Carriers can be replaced in approximately 30 minutes without a need to shut down the entire system. |
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