Intevac was the first to successfully deliver PMR deposition technology to customers with the patented 200 Lean® hard disk sputtering system. Today, the 200 Lean is the leading production proven system for perpendicular processing. Designed from the ground up with lean principles, the 200 Lean offers the ultimate in flexibility with a modular and fully extendible architecture. The modular design accommodates the production of multiple disk sizes, both aluminum and glass disks, and the growing number of thin-film process steps required by advanced technologies such as perpendicular processing. The system can be configured with as few as 4 process stations or as many as 24, allowing for extendibility from one generation to the next in advanced media processing.
The 200 Lean is a linear system with a footprint that is just 1/3rd that of the nearest competitor’s system. Higher throughput (>800) from a small footprint enables more magnetic disks to be manufactured per square foot of factory floor space increasing space utilization, improving granularity and reducing total cost of ownership.
The 200 Lean is a single disk processing system for optimum process control and disk-to-disk uniformity. Film capability includes hard magnetic layers, non-magnetic layers, soft under layers and carbon layers.
Component technologies include the Universal Source with improved target utilization; the Carbon Heater Station designed for fast efficient heating of both glass and aluminum substrates; the Rotation Station to ensure 100% coverage for glass disks; the Dynamic Cooling Station designed to achieve a high cooling rate; and the Carrier Exchange for improved system availability.
| Features | Benefits |
| Modular Architecture | Flexibility for Future Media Requirements |
| Linear Design | Ease of Serviceability |
| 4 to 24+ Process Stations | Complex Perpendicular Stack Capability |
| Single-disk Processing & Handling | Uniform, Repeatable Films |
| Compact Small Footprint | Low Total Cost of Ownership High Space Utilization |
For more information contact 200lean@intevac.com
